System Overview
Find the right machine
for your needs
Specially developed laser technology for the highest quality on all wafer materials.
Marking
2"-200mm
IL 600
- Manual handling
- Wafer holder for various wafers
- Suitable for low volumes
Marking
2"-200mm
IL 1000
- Automatic handling
- One load station
- Small footprint required
Marking
2"-200mm
IL 2000
- Automatic handling
- Four load stations
- Also configurable with sorting function
Marking
200mm
IL C2000
- Automatic handling
- Up to three load stations
- ISO 3 minienvironment
Marking
300mm
IL 3000
- Hard marking of unpolished wafers
- Suitable for manual loading
- Four load stations
Marking
300mm
IL C3000
- Soft marking of polished wafers
- Suitable for AGV/OHT loading via E84
- ISO 3 minienvironment
Marking
300mm
IL D3000
- Hard marking of unpolished wafers
- Suitable for AGV/OHT loading via E84
- Fan filter units optional
Sorting
2"-200mm
IL 2600
- Sorting by ID, weight & thickness
- High throughput up to 250 wafers per hour
- Small footprint
Sorting
300mm
IL C3200
- Sorting by ID or inspection result
- Suitable for AGV/OHT loading
- ISO 3 minienvironment available
Sorting
300mm
IL C3600
- Sorting by ID or inspection result
- Suitable for AGV/OHT loading
- ISO 3 minienvironment available
Sorting
300mm
IL C3800
- Sorting by ID or inspection result
- Suitable for AGV/OHT loading
- ISO 3 minienvironment available
Consulting & Configuration
Consulting & Configuration
From the initial requirements analysis to the successful final acceptance of your wafer marking system, a personal contact person will accompany you – for a solution tailored exactly to your production requirements.
InnoLas Sales Team
InnoLas wafer marking and sorting systems offer maximum precision, cleanroom compatibility, and full traceability for efficient, stable semiconductor processes.
- Offline or full MES connection via SECS/GEM
- Optional custom interfaces
- Manual or fully automatic AGV/OHT loading via E84