IL C3000
The IL C3000 is the ideal solution for particle-free marking of polished 300mm wafers. Wafers are handled and aligned fully automatically – they are fed directly via up to three FOUP loadports into the integrated ISO-3 mini-environment (according to ISO 14644-1), which meets the highest purity requirements and reliably keeps the wafer surface clean throughout the entire process. Optionally, the system can also be equipped with edge grip handling – for even gentler wafer transfers.
- For polished 300mm wafers (soft marking)
- Automated Edge Grip Handling & Wafer Alignment
- Up to 3 Loadports
- Automated loading via Semi E84 interface possible
- ISO 3 Mini-Environment (ISO 14644-1)
Individually configurable – for the right wafer marker
With a variety of optional features, the basic machine can be individually expanded to meet our customers’ wishes and requirements. Even a sorting function is available for the IL2000, allowing the system to be used as a wafer sorter.
Highest cleanliness thanks to ISO3 Mini-Environment
With up to two SMIF stations, up to 50 wafers can be loaded simultaneously onto the machine. A slight overpressure is maintained in the process and transfer chamber at all times, ensuring that the wafers are exclusively exposed to clean, filtered air.
The robot can be equipped as a single- or dual-arm, making the IL C2000 ideal for medium to high production volumes with SMIF pods.
