IL C2000
The IL C2000 was specifically developed for particle-free marking of 200mm wafers handled in a SMIF pod. The integrated Class 3 cleanroom mini-environment (ISO EN 14644-1) reliably keeps the wafer surface clean throughout the entire process—ideal for the highest purity requirements. Thanks to opto-mechanical alignment and a precise optional dual-arm robot system, the IL C2000 marks up to 160 wafers per hour and is also compatible with standard AGV and OHT loading systems.
- For polished 200mm wafers (Softmarking)
- Automated wafer handling & alignment
- Up to 2 SMIF loadports
- ISO 3 mini-environment (ISO 14644-1)
- Loading via SEMI E84 standard possible
Individually configurable—for the right wafer marker
With a variety of optional features, the base machine can be individually expanded to meet our customers’ specific needs and requirements. Even a sorting function is available for the IL2000, allowing the system to be used as a wafer sorter.
Highest cleanliness thanks to ISO3 mini-environment
With up to two SMIF stations, up to 50 wafers can be loaded simultaneously on the machine. A slight overpressure is maintained in the process and transfer chambers at all times, ensuring that the wafers are exposed only to clean, filtered air.
The robot can be equipped as a single-arm or dual-arm system, making the IL C2000 ideal for medium to high production volumes with SMIF pods.
