Wafer Marking

IL 1000

The IL1000 combines automatic wafer handling and alignment with a particularly compact footprint. Wafers from 3 inches to 200 mm are precisely positioned and marked without mechanical adjustment—fast, repeatable, and space-saving thanks to just one cassette station. The ideal solution for companies with medium production volumes seeking automation and efficiency without sacrificing flexibility.

Laser optics with aperture in the wafer marking system
Floor Space

Small Footprint - High Performance

With dimensions of only 1,430 x 920 mm, the IL 1000 is probably the most compact automated wafer marking system on the market. Despite its small footprint, the machine can be loaded with up to 25 wafers, which are then automatically marked according to your individual specifications.

SEMI-compliant marking
up to 100 WPH
Marking accuracy approx. +/-100 µm
small footprint
For medium production volumes

Overall, the system can mark up to 100 wafers per hour with a unique code—making the IL 1000 ideal for medium production volumes.

Marking

Wafer Marking Expertise

Over 30 years of experience in semiconductor wafer marking helps enormously in marking all wafer materials common in the semiconductor industry precisely and particle-free. The IL1000 makes no compromises in quality, as only high-quality laser sources at the highest technical level are used.

Laser head for wafer marking
+49 8143 24195-0sales@il-semi.comDirectionsPersonal Support

Documents for the IL 1000

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  • Product catalogPDF · 6.0 MB
  • Technical data sheet IL 1000PDF · 245.5 KB

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