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IL 1000
The IL1000 combines automatic wafer handling and alignment with a particularly compact footprint. Wafers from 3 inches to 200 mm are precisely positioned and marked without mechanical adjustment—fast, repeatable, and space-saving thanks to just one cassette station. The ideal solution for companies with medium production volumes seeking automation and efficiency without sacrificing flexibility.
- 3 inches to 200 mm wafers
- Automated handling & alignment of wafers
- One cassette station, therefore small footprint
- Ideal for medium production volumes
Small Footprint - High Performance
With dimensions of only 1,430 x 920 mm, the IL 1000 is probably the most compact automated wafer marking system on the market. Despite its small footprint, the machine can be loaded with up to 25 wafers, which are then automatically marked according to your individual specifications.
Overall, the system can mark up to 100 wafers per hour with a unique code—making the IL 1000 ideal for medium production volumes.
Wafer Marking Expertise
Over 30 years of experience in semiconductor wafer marking helps enormously in marking all wafer materials common in the semiconductor industry precisely and particle-free. The IL1000 makes no compromises in quality, as only high-quality laser sources at the highest technical level are used.
Additional Wafer Marking Systems
IL 600
- Manual handling
- Wafer holder for various wafers
- Suitable for low volume
IL 2000
- Automatic handling
- Four loading stations
- Also configurable with sorting function
IL C2000
- Automatic handling
- Up to three loading stations
- ISO 3 minienvironment

