IL C3800
This all-rounder, featuring up to seven load ports or two inspection units, can be enhanced with a variety of optional features to precisely meet our customers’ requirements.
- Splitting, merging, and sorting of 300 mm wafers
- Up to 7 load ports
- ISO 3 mini-environment (ISO 14644-1)
- Suitable for PGV, AGV, and OHT
- Vacuum or edge grip handling available
Maximum flexibility through modular configuration
The IL C3800 offers a high degree of configuration freedom and can be optimally adapted to various production and process requirements. Depending on the application, up to seven load ports can be integrated or up to two inspection modules can be used simultaneously.
The IL C3800 thus enables both high throughput in automated wafer provisioning and the combination of multiple testing and inspection steps within a single system. The modular architecture provides maximum flexibility, making the IL C3800 a versatile platform for modern wafer handling and inspection applications.
Cleanliness at the highest level
The IL C3800’s mini-environment creates optimal conditions for processing sensitive wafers. ULPA high-performance filters, precise flow regulation, and the consistent stainless steel design of the interior ensure a controlled and ultra-pure process environment. This minimizes the risk of particle contamination and guarantees reliable wafer handling, even under the most demanding cleanliness requirements.
Other wafer sorting systems
IL 2600
- Sorting by ID, weight & thickness
- High throughput of up to 250 wafers per hour
IL C3200
- Sorting by ID or inspection result
- Suitable for AGV/OHT loading
- ISO 3 mini-environment available
IL C3600
- Sorting by ID or inspection result
- Suitable for AGV/OHT loading
- ISO 3 mini-environment available