IL C3600
The IL C3600 is far more than a high-performance wafer sorting system. Thanks to its flexible system concept, it is also ideally suited as an EFEM (Equipment Front End Module) for automated process, metrology, and inspection applications.
- Splitting, merging, and sorting 300 mm wafers
- Up to 5 loadports
- ISO 3 Mini-Environment (ISO 14644-1)
- Suitable for PGV, AGV, and OHT
- Vacuum or edge-grip handling available
One platform – numerous applications
The IL C3600’s key strength lies in its modular, adaptable architecture. Depending on customer requirements, the system can be equipped with different handling and functional modules and tailored to specific metrology and inspection tasks.
This creates a flexible platform for applications where automated wafer handling, metrology, and inspection must be combined. Customer-specific integrations and connectivity to external systems are, of course, also possible.
Precise handling meets intelligent integration
For processing 300 mm wafers, the IL C3600 features a single- or dual-arm robot and can be equipped with up to five automatic FOUP loadports. The system operates in an ISO 3 Mini-Environment and supports automated loading via AGV, PGV, and OHT.
This makes the IL C3600 an ideal basis for modern production and test environments—whether as a sorting system, as an EFEM, or as an integrated handling platform for metrology and inspection solutions.
More wafer sorting systems
IL 2600
- Sorting by ID, weight & thickness
- High throughput of up to 250 wafers per hour
IL C3200
- Sorting by ID or inspection result
- Suitable for AGV/OHT loading
- ISO 3 Mini-Environment available
IL C3800
- Sorting by ID or inspection result
- Suitable for AGV/OHT loading
- ISO 3 Mini-Environment available