IL D3000
High-quality, high-speed Hard Laser Marking (HLM) of unpolished wafers is one of the ideal application areas for the IL D3000 platform. The wafers can be provided flexibly in open cassettes or FOUPs and automatically loaded onto the system via the SEMI E84 standard using AGV or OHT.
- 300 mm wafer
- Automated machine loading via an OHT system possible
- Can optionally be equipped with FFUs
- Ideal for high production volumes and 24/7 production
Individually configurable – for the right wafer marker
With a wide range of optional features, the base machine can be expanded individually to meet our customers’ wishes and requirements. A sorting function is also available for the IL2000, allowing the system to be used as a wafer sorter.
Maximum cleanliness thanks to an ISO 3 mini-environment
With up to two SMIF stations, up to 50 wafers can be loaded onto the machine at the same time. A slight overpressure is always maintained in the process and transfer chamber, so the wafers are exposed exclusively to clean, filtered air.
The robot can be equipped with a single or dual arm, making the IL D3000 ideal for medium to high production volumes.
