IL C3200
The IL C3200 wafer sorting system/EFEM was developed for reliable, precise wafer handling in demanding production and manufacturing environments. The system enables efficient sorting and organization of wafers, thereby supporting automated processes in the semiconductor industry.
- Splitting, merging and sorting 300 mm wafers
- Up to 3 FOUP load ports
- ISO 3 minienvironment (ISO 14644-1)
- Suitable for PGV, AGV and OHT
- Vacuum or edge-grip handling available
Excellent availability
The IL C3200 impresses with its high reliability and availability in day-to-day production operations. The robust, proven system technology ensures stable processes and minimizes unplanned downtime. This wafer handling system supports continuous production and provides a reliable solution for demanding wafer-handling requirements.
Individually expandable with the right metrology
With a wide range of optional measuring equipment and inspection applications, the IL C3200 handling system can be expanded into a fully automated inspection machine. Wafers that do not meet the specified requirements are automatically rejected immediately after measurement. At the same time, the respective measurement results are stored and documented.
More wafer sorting systems / EFEMs
IL 2600
- Sorting by ID, weight & thickness
- High throughput up to 250 wafers per hour
IL C3600
- Sorting by ID or inspection result
- Suitable for AGV/OHT loading
- ISO 3 minienvironment available
IL C3800
- Sorting by ID or inspection result
- Suitable for AGV/OHT loading
- ISO 3 minienvironment available