Wafer Marking

IL 2000

The IL2000 is our high-performance system for demanding production environments. Fully automated wafer handling and alignment, up to four open cassette stations, and throughput of up to 180 wafers per hour make it the first choice for high-volume manufacturing. Thanks to its dual function as a marking and sorting system, the IL 2000 reduces process steps and noticeably increases the efficiency of your production line.

Wafer stations and gripper in the InnoLas IL 2000
Cost efficiency

Excellent availability and the lowest cost per wafer

With four stations, up to 100 wafers can be loaded on the machine at the same time. Intelligent sequencing of work orders ensures there is no downtime due to loading and unloading cassettes.

SEMI-compliant marking
Up to 180 WPH
Marking accuracy approx. +/-100 µm
98% uptime
For high production volumes

The two end effectors and simultaneous processing are key to enabling the system to mark up to 180 wafers per hour—making the IL2000 ideal for high production volumes.

Customizability

Individually configurable—for the right wafer marker

A wide range of optional features allows the base machine to be expanded individually to meet our customers’ wishes and requirements. A sorting function is also available for the IL2000, enabling the system to be used as a wafer sorter.

Camera with red ring light above a wafer in a wafer marking system
+49 8143 24195-0sales@il-semi.comDirectionsPersonal Support

Documents for the IL 2000

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  • Product catalogPDF · 6.0 MB
  • Technical data sheet IL 2000PDF · 262.1 KB

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