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IL 2000
The IL2000 is our high-performance system for demanding production environments. Fully automated wafer handling and alignment, up to four open cassette stations, and throughput of up to 180 wafers per hour make it the first choice for high-volume manufacturing. Thanks to its dual function as a marking and sorting system, the IL 2000 reduces process steps and noticeably increases the efficiency of your production line.
- 3-inch to 200 mm wafers
- Automated wafer handling & alignment
- Up to four cassette stations
- Can also be used as a sorting system
- Ideal for high production volumes
Excellent availability and the lowest cost per wafer
With four stations, up to 100 wafers can be loaded on the machine at the same time. Intelligent sequencing of work orders ensures there is no downtime due to loading and unloading cassettes.
The two end effectors and simultaneous processing are key to enabling the system to mark up to 180 wafers per hour—making the IL2000 ideal for high production volumes.
Individually configurable—for the right wafer marker
A wide range of optional features allows the base machine to be expanded individually to meet our customers’ wishes and requirements. A sorting function is also available for the IL2000, enabling the system to be used as a wafer sorter.
More wafer marking systems
IL 600
- Manual handling
- Wafer holder for different wafers
- Suitable for low volume
IL 1000
- Automated handling
- One load station
- Small footprint
IL C2000
- Automated handling
- Up to three load stations
- ISO 3 minienvironment


