IL C4000
- Wafer Marking Back to overview
- IL C4000
- Used for polished 450mm wafer (Softmarking) Automatic handling & alignment of the wafer Up to two FOUP Loadports ISO 3 Minienvironment (ISO 14644-1) Can be used as a bridge tool (300/450mm)
- PDF | Download broschure
- PDF | Download datasheet
Machine Comparison
- IL C4000 (Softmark)
- Throughput: 85 wafer | hr100 wafer | hr
- IL 4000 (Deepmark)
- Throughput: 85 wafer | hr100 wafer | hr
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IL C3000 HT