IL 4000
- Wafer Marking Back to overview
- IL 4000
- Used for unpolished 450mm wafers (Deepmarking) Automatic handling & alignment of the wafer UP to two FOUP loadports Can be used as a bridge tool (300/450mm)
- PDF | Download broschure
- PDF | Download datasheet
Machine Comparison
- IL 4000 (Deepmark)
- Throughput: 85 wafer | hr100 wafer | hr
- IL C4000 (Softmark)
- Throughput: 85 wafer | hr100 wafer | hr
- More Wafer Marking Systems
IL 600
IL 1000
IL 2000
IL 3000
IL C3000
IL C3000 HT
IL C4000