IL C3000 HT
- Wafer Marking Back to overview
- IL C3000 HT
- Used for polished 300mm wafer (Softmarking) Automatic handling & alignment of the wafer UP to two FOUP loadports ISO 3 Minienvironment (ISO 14644-1) High throughput model with up to 180 wafer|hr
- PDF | Download broschure
- PDF | Download datasheet
Machine Comparison
- IL C3000 HT (Softmark)
- Throughput: 120 wafer | hr180 wafer | hr200 wafer | hr
- IL C3000 (Softmark)
- Throughput: 120 wafer | hr180 wafer | hr200 wafer | hr
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