The InnoLas wafer marking systems are specially designed to mark semiconductor wafers with an individual code. This process serves to ensure the traceability of each individual wafer throughout the entire manufacturing process.
In order to always obtain a homogeneous and clean marking process on a wide variety of materials, we use a laser specially developed for marking on semiconductor materials. This, in combination with the optimal optical setup, guarantees high quality marking and also prevents any negative influence on subsequent processes.
A variety of fonts used in the semiconductor industry, such as SEMI OCR, SEMI T7 Data Matrix, Barcode 412 and “Engraved Mode” can be lasered onto the wafers in a recipe-controlled manner. Of course, the SEMI specifications applied for this purpose are taken into account. Excellent and reliable readability with commercially available reading systems is another feature of our marking processes, which are subject to continuous further development.