IL C3800

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  • IL C3800
  • Split, merge and sort 300mm wafers Up to 7 automatic FOUP Loadports ISO 3 minienvironment (ISO 14644-1) Suitable for PGV, AGV and OHT loading Can be used as a wafer tranfer module in comparison with a measurement or inspection tool (EFEM)
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Machine Comparison
  • IL C3800
  • Handling: Manual | Automatic
  • Number of loadports: 3 loadports5 loadports7 loadports
  • IL C3200
  • Handling: Manual | Automatic
  • Number of loadports: 3 loadports5 loadports7 loadports
  • IL C3600
  • Handling: Manual | Automatic
  • Number of loadports: 3 loadports5 loadports7 loadports
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