 Wafer Sorter IL C 3400The InnoLas C 3400 wafer sorting and inspection system is a multifunctional tool that can be used to sort, transfer and inspect wafers for various applications. It is equipped with a class 1 mini-environment including an ionization unit with flow controlled by a differential pressure sensor. The system uses a 300 mm edge grip handling and aligner unit. The versatile and compact six station design allows integration of various combinations of automatic FOUP opener, aligner and presenter units. The basic model has one reading unit (OCR, BC412, T7) for reading the code on the backside of the wafer. A second reading unit (OCR, BC412, T7) for reading the code on the frontside of the wafer can be added as an option. |