Laser Marking and Wafer Sorting – 300 mm Wafers

InnoLas Semiconductor develops and manufactures highly efficient processing systems for laser marking, sorting and inspection of wafers for the semiconductor industry.

All marking and sorting processes meet the common industrial standards (SEMI, ...) for the production of semiconductor wafers. State of the art laser quality, sophisticated automation, precise handling systems and advanced application software offer greater productivity and overall system reliability.

For 300 mm wafers, InnoLas Semiconductor offers the IL C 3000 series for wafer marking (with integrated class 1 mini-environment), the IL 3000 Plus series for wafer laser marking and the IL C 3400 and IL C 3800 series as multi functional tools for wafer sorting as well as wafer inspection (with integrated class 1 mini-environment).