 Wafer Sorting and Inspection System – IL 2600The InnoLas IL 2600 wafer sorting system can automatically sort, split, merge and transfer wafers from any slot / cassette to any other slot / cassette in a six cassette array. Wafer sizes from 100 mm to 200 mm can be handled in a single or multi-batch operation without the need of any mechanical adjustments. The laser mark code read for verification can be located at any position on the front and/or backside of the wafer. The basic model has one reading unit (OCR, BC412, T7) for reading the laser code on the frontside of the wafer. A second reading unit (OCR, BC412, T7) for reading the code on the backside of the wafer can be mounted as an option. Download: Leaflet IL 2600 (PDF 480 KB) |